X-Ray Lithography Studies of Polysilane using a Laser Plasma X-Ray Source

Droplet-target laser-plasma source for proximity x-ray lithography

A compact, high-brightness and practically debris-free laser-plasma soft x-ray source for proximity x-ray lithography is described. The target of the source is small liquid fluorocarbon droplets injected into vacuum with a piezoelectrically vibrated nozzle. Emission from heliumand hydrogenlike fluorine in the 1.2–1.7 nm wavelength range was determined to ;2310 photons/~sr-pulse!, which correspo...

Single-optical-element soft-x-ray interferometry with a laser-plasma x-ray source.

We report on a compact interferometer for the water-window soft-x-ray range that is suitable for operation with laser-plasma sources. The interferometer consists of a single diffractive optical element that focuses impinging x rays to two focal spots. The light from these two secondary sources forms the interference pattern. The interferometer was operated with a liquid-nitrogen jet laser-plasm...

Laser plasma x-ray source for ultrafast time-resolved x-ray absorption spectroscopy

We describe a laser-driven x-ray plasma source designed for ultrafast x-ray absorption spectroscopy. The source is comprised of a 1 kHz, 20 W, femtosecond pulsed infrared laser and a water target. We present the x-ray spectra as a function of laser energy and pulse duration. Additionally, we investigate the plasma temperature and photon flux as we vary the laser energy. We obtain a 75 μm FWHM x...

2. Microfabrication Using X- ray Lithography

Soft-x-ray projection lithography

Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.